The Cleanroom Challenge: ISO Classes & Outgassing

Introduction: The Invisible Threat

In a cleanroom environment—such as a semiconductor "fab" or a satellite assembly facility—a single speck of dust or a microscopic droplet of oil can ruin a multi-million dollar wafer. Standard linear components are "dirty" by nature; they shed particles as they rub and emit gases from their lubricants.

To operate in these environments, TOCO components must meet specific ISO 14644-1 classes, where the goal is to minimize both particulate generation and outgassing.


1. Understanding Outgassing (TML & CVCM)

In a vacuum or high-heat cleanroom, standard greases "boil" at a molecular level. This is called outgassing. These vapors then condense on sensitive lenses or sensors, fogging them up.

  • The Solution: TOCO utilizes specialized fluorinated lubricants (PFPE). These have extremely low vapor pressure, ensuring they stay liquid even in a vacuum.

  • Vacuum Compatibility: For space-grade applications, we ensure materials meet low Total Mass Loss (TML) requirements.


2. Particulate Control: The ISO Rating

Every time a carriage moves, the friction between the balls and the rail creates tiny metal or plastic flakes.

  • ISO Class 5 & Above: Requires the use of low-dust ball chains (as seen in Linear Motion in Medical & Lab Automation) to prevent ball-on-ball friction.

  • Stainless Steel Only: To prevent oxidation particles (rust dust), all structural parts are made of SUS440C or similar stainless alloys.

  • Suction Spacers: Advanced TOCO cleanroom modules often include a vacuum port that "sucks" air out from inside the bellows, capturing particles before they can escape into the room.


3. Surface Treatments: The "No-Flake" Rule

Standard coatings like black oxide can flake off over time. For cleanrooms, we recommend:

  • Electroless Nickel Plating: Provides a very hard, smooth surface that does not shed particles.

  • Raydent Treatment: A specialized cryogenic coating that integrates with the steel lattice, offering superior corrosion resistance without the risk of peeling.


4. Special Packaging & Cleaning

A cleanroom component is only as clean as its last touch.

  • Ultrasonic Cleaning: Before assembly, parts undergo multi-stage ultrasonic degreasing in a controlled environment.

  • Double-Bagging: TOCO cleanroom products are cleaned, lubricated, and then double-vacuum-sealed in an ISO Class 6 environment. The outer bag is removed in the "ante-room," and the inner bag is only opened inside the actual cleanroom.

Double-Sealed Cleanroom Packaging process


5. Design Tip: Over-Sizing for Longevity

In a cleanroom, you cannot easily perform maintenance. By selecting a TOCO rail with a higher load capacity than necessary, you reduce the internal stress on the balls, which significantly lowers the rate of particulate shedding from the raceways.